20" x 20" Travel Stage.
Franklin MCI designed and manufactured this entire system except for the wafer robot. The wafer robot was supplied by the customer. Franklin designed and made the following: Complete enclosure, wafer cassette bases with sensors, all precision mechanical stages and ball bearing movements, and provided the motor controllers. T
This system handled 4,5,6, and 8 inch wafers.
Franklin MCI designed and manufactured this system to the customers specifications. The granite was designed by Franklin, but purchased from a granite manufacturer. Franklin manufactured the complete enclosure and custom 26 "x 32" travel motorized stage. They also provided a motorized Z-motion stage for a 35 pound microscope.
This system was used in the flat panel industry.